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Attaining quantitatively fewer defects in close-packed InGaZnO synthesized using atomic layer deposition

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Author: Yoon-Seo Kim, Hyunmin Hong, TaeHyun Hong, Su-Hwan Choi, Kwun-Bum Chung, Jin-Seong Park

Journal: Applied Surface Science

Vol: 664

Page: 160242

Year: 2024

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